• CPD 408 Critical Point Drying for MEMS
  
  
• Safe and easy operation
• Gentle substrate treatment
• Compact bench top unit
• Economical operation
• Excellent visual access

The CPD 408 has been developed for critical point drying of large, flat specimens e.g. wafers for MEMS. The unique double chamber system ensures a minimum consumption of CO2. The handling is very simple and the fully automatic process is computer controlled.

• MAC 240 Deposition Device
  
  
• Simple one button operation
• Easy to loading / unloading of master through magnetic coupling
• Fast target changes as well as quick and user friendly maintenance
• Compatible with all common mastering processes (Ni, Ni/Va Ag)
• Low target material cost
• Small footprint, single phase, no external water cooling required

The MAC 240 has been designed to coat 180 / 240mm CD and DVD masters with nickel, nickel/vanadium or silver. The simple and reliable coater is available as stand-alone or as OEM in-line unit.

• URC 300 Coil to Coil Foil Coater
  
  
• Non-creasing coil to coil sputter system for foils down to 2µm thickness
• Metallization with various materials (i.e. Cr, Pt, Au...)
• Surface resistance controlled coating
• Transparent conducting coatings or coatings for foil capacitors
• Economical operation
• Excellent visual access